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터보 펌프

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Turbo pump

  • 모델명 ATH2300M
  • 제조사 Alcatel-lucent
  • 장비용도 분석
  • 장비구분 기계가공/시험장비 > 열유체장비 > 펌프

상세정보

구축일자 2011-03-24
납품업체 Alcatel-lucent
위치 광주광역시 북구 첨단과기로 123 (오룡동) 1 광주과학기술원 극초단 광양자빔 특수연구동 F1 117
구성및성능 Inlet flange: DN 250 ISO-F
Rotational speed (RPM): 31000
Pumping speed N2 (l/s): 2100
Pumping speed H2 (l/s): 1200
Ultimate pressure (mbar): 4 *10-9
장비안내 PW compressor (vacuum chamber)의 진공을 발생/유지하는데 사용되는 터보 펌프로 특징은 아래 개발사 소개글과 같다.

[http://www.adixen.com/press-releases/vacuum-pumps-adixen-ath-2300m-a-very-high-flow-maglev-turbopump-in-a-very-small-package-sizevacuum433ppp.html]
Alcatel Vacuum Technology extends its product range by introducing ATH 2300M a very high flow maglev turbopump designed for semiconductor etch processes. The ATH 2300M features 2 000 liters per second performance in a very compact package size. Adixen ATH 2300M is capable of pumping up to 2 000 sccm of argon in order to meet the highest requirements for the 012 micron geometry etching processes. Adixen’s particle reduction technology is featured in the ATH 2300M ATH 1600M ATH 1300M and ATH 400M. These extremely reliable pumps offer high troughput high pressure corrosive gas pumping and are quickly becoming the turbopump of choice in fabs throughout the world. Additionally these pumps feature state of the art technologies which include : - 5 active axes ; the most reliable and proven magnetic bearing technology. - Automatic balancing system for any rotor imbalance compensation. - Integrated heating system up to 75°c to eliminate the condensation of by-products. - Inert gas purge to prevent particle build up. The Adixen Maglev Turbopumps are maintenance free battery free dedicated to metal dielectric or poly etch ion implantation sputtering and plasma deposition.

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