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대학 인프라와 자원을 공유해 공동 연구와 기술 활용을 지원합니다.

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공동활용 연구장비

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표면 프로 파일러

상담·문의하기

Surface Profiler

  • 모델명 AS500
  • 제조사 Alpha-Step
  • 장비용도 시험
  • 장비구분 전기/전자장비 > 달리분류되지않는전기/전자장비

상세정보

구축일자 1998-11-04
납품업체 Alpha-Step
위치 광주광역시 북구 첨단과기로 123 (오룡동) 1 광주과학기술원 정보통신 A동 F1 108
구성및성능
장비안내 The Alpha- Step IQ is a state-of-the-art stylus-based surface profiler that combines high measurement precision with versatiity and economy. Ideal for applications such as pilot lines and materials research this advanced profiler enables faster process learing and higher yields. With guaranteed 7.5 (1s) or 0.1% step height repeatability and sub-angstrom resolution the Alpha-Step IQ provides excellent repeatability and performance to analyze and
monitor processes. This system offers the most complete suite of two-dimensional analysis features for surface topography analysis on a variety of surfaces including wafers MEMS ceramics SIMS craters microlenses and displays. With many options available the Alpha-Step IQ provides flexibility for high vertical ranges powerful optics for sample positioning an integrated report generator and multiple language support. The system is controlled by a fast and powerful computing platform offering networking and USB communications.