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ULTRA-PRECISION AIR-BEARING STAGE SYSTEM

  • 모델명 ABL15020
  • 제조사 Aerotech
  • 장비용도 기타
  • 장비구분 기계가공/시험장비 > 자동화/이송장비 > 위치제어장비

상세정보

구축일자 2010-10-19
납품업체 Aerotech
위치 광주광역시 북구 첨단과기로 123 (오룡동) 1 광주과학기술원 고등광기술연구소 F1 101호
구성및성능 Travel: X 200 mm Y 200 mm
Resolution: 5nm
Maximum speed: 2 m/s
Drive system: Linear Brushless servomotor
장비안내 1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
2. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
3. Thermal limitations of positioning stage with respect to performance may limit continuous force output.
4. Force may be limited by amplifier output.
5. Values with Aerotech controls and HALAR option.
6. Dependent on flatness of stage mounting surface.
7. To protect air bearing against under-pressure an in-line pressure switch tied to the motion controller/amplifier E-stop input is recommended.
8. Air supply must be clean dry to 0° F dewpoint and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
9. Maximum upper axis length is 200 mm when mounting the ABL1500 in an XY configuration

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