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공동활용 연구장비

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마스크 얼라이너

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Mask Aligner

  • 모델명 CA-6M
  • 제조사 신우엠에스티
  • 장비용도 분석
  • 장비구분 기계가공/시험장비 > 반도체장비 > 리소그래픽장비

상세정보

구축일자 2009-10-28
납품업체 신우엠에스티
위치 광주광역시 북구 첨단과기로 123 (오룡동) 1 광주과학기술원 신소재공학동 F5 504호
구성및성능 0.7마이크로 미터 패턴까지 가능 (AZ7220을 포토레지스트 사용시)
1. Standard Features
Model : CA-6M
1.1 High Efficiency, Uniform 350W UV Exposure System.
1.2 Intensity Controlling Power Supply.
1.3 Wide range of options including special alignment Optics.
1.4 Micron Printing and Precision Alignment System.
1.5 User Settable Substrate to Mask Pressure.
1.6 Soft and Hard Vacuum Contact Capability.
1.7 Best precise Chuck Motion via Micrometers.(X,Y,Z and Theta axis)
2. Consist of system.
2.1 High Performance UV Lightsource Systems. - - - - - - - - - 1set
- Employs an elliptical reflector, dielectric heat removing and Highly Collimated
Reflection Mirror.
- Active Area : Uniform beams up to 6.25″ X 6.25″
- 350W Near UV Lamp.
- High Intensity systems resolve very fine structures.
2.2 Intensity Controlling Power Supply Systems. - - - - - - - - - 1set
- Provide a wide range of intensities with better than ±2% precision and long term
repeatability.
- Sensor mounted within the lightsource system provide real-time optical feedback to
장비안내 특징
고해상도 UV를 이용 포토레지스트를 패턴함
4. Specifications
ITEMS SPECIFICATIONS
UV LIGHTSOURCE Beam Size 6.25″ X 6.25″
Lamp power 350Watt.
Beam Uniformity Less than ±3~5%
Output Beam Intensity 365nm : Approximately Max 25 mW/㎠
406nm : Approximately 40 mW/㎠
Cooling Forced Air Cooling System
UV POWERSUPPLY Power Range 200W idle, (Range : 170
~350kW) NUV only.
Power Regulation Better than ±0.5%
Intensity Control Optical Feedback loop with ±2% long term
repeatability.
System Alarm Audible Maximum Power Warning.
MASKALIGNMENTTOOLINGSYSTEM Mask Size Capability Up to 7.0″ X
7.0″.
Mask Clamp Vacuum and Physical Clamp.
Mask / Substrate Seperation Separation in 2.5㎛ increments.

Chuck Motions X,Y,Z and Theta motion control via Micrometer.

(X,Y motion : ± 10mm, Theta : 4degrees, : Accuracy 1.0㎛)

Chuck Incremental Z-Motion Accuracy : 2.5㎛
Chuck Z range 5mm
Chuck Leveling Wedge Error Compensation System.
Alignment Resolution Less tha

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