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전계방사형 주사전자현미경

상담·문의하기

Field Emission Scanning Electron Microscope

  • 모델명 S4700, EMAX System
  • 제조사 Hitachi
  • 장비용도 분석
  • 장비구분 광학/전자영상장비 > 현미경 > 주사전자현미경

상세정보

구축일자 2004-07-27
납품업체 Hitachi
위치 광주광역시 북구 첨단과기로 123 (오룡동) 1번지 광주과학기술원 고등광기술연구소 F1 102
구성및성능 1. Column 1) Secondary electron image resolution - 1.5nm at 15kV (WD=12mm) or better - 2.2nm at 1kV (WD=1.5mm) or better 2) Magnification : 25 to 500 000x or wider 3) Accelerating voltage : 0.5 - 30kV or wider 4) Gun source : Should be Cold Field Emission gun 5) Lens system : Three stage electromagnetic lens Conical obj. lens 6) Objective lens aperture : Variable 4 steps 7) Stigmator : 8- pole electromagnetic type (X Y) 8) Scanning coil : 2- stage electromagnetic deflection type 9) Probe current : 1pA ~ 2nA or better 10) Specimen stage - Type : Eucentric 2-axis motorized stage - X Movement : 0 to 25mm or wider - Y Movement : 0 to 25mm or wider - Z Movement : 1.5 to 26.5mm or wider - Tilt angle : -5˚ to +45˚ or wider - Rotation : 360˚ continuous - Max. specimen size : 100mmφ or larger ( Airlocking 2. Display 1) Image display system Flicker-free image presentation at all scanning speed 2) Frame memory : 2048 x 2048 pixels or better 3) Display monitor : 22" UHR CRT or 18.1" TFT-LCD monitor or better 4) Scanning
장비안내 1. Observation Possible at High Resolution in wide Accelerating Voltage - This equipment should be designed low- aberration objective lens which is guaranteed high resolution particularly at medium / low accelerating voltages. - An excellent performance should be guaranteed at practical accelerating voltages which are frequently used for SEM observation EDX analysis etc. 2. Operating Condition Memory for multi user This SEM should be possible to save various conditions of the electron optics in use by assigning the condition number to them and reset the same conditions by designating the corresponding number. 3. Comfortable SEM Operation under GUI (Graphical User Interface ) Environment - All operating software should be MS Windows NT™ or better 4. Signal Mixing of Upper and Lower Secondary Electron Detectors - This SEM should be standard-equipped with the function for mixing the detection signals of the secondary electron detectors provided at the top and bottom of the objective lens. 5. Design Oriented to t

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