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초고분해능 전계방사형 주사전자현미경

상담·문의하기

Ultra High Resolution Field Emission Scanning Electron Microscope

  • 모델명 Verios 5 UC
  • 제조사 Thermo Fisher Scientific
  • 장비용도 시험
  • 장비구분 광학/전자영상장비 > 현미경 > 주사전자현미경

상세정보

구축일자 2020-12-17
납품업체 Thermo Fisher Scientific
위치 광주광역시 북구 첨단과기로 123 광주과학기술원 중앙연구기기센터 (C11) F1층 103호
구성및성능 [ Electron optics ]
• Elstar extreme high-resolution field emission SEM column with:
– Immersion magnetic objective lens
– High-stability Schottky field emission gun to provide stable high-resolution analytical currents
– UC+ monochromator technology
– SmartAlign: user-alignment-free technology
• 60 degree dual objective lens with pole piece protection allows tilting larger samples
• Automated heated apertures to ensure cleanliness and touch free aperture exchange
• Electrostatic scanning for higher deflection linearity and speed
• ConstantPower™ lens technology for higher thermal stability
• Integrated Fast Beam Blanker*
• Beam deceleration with stage bias from 0 V to -4 kV
• Minimum source lifetime: 12 months

[ Electron beam resolution ]
• 0.6 nm at 30 kV STEM*
• 0.6 nm at 2-15 kV
• 0.7 nm at 1 kV
• 1.0 nm at 500 V

[ Electron beam parameter space ]
• Electron beam current range: 0.8 pA to 100 nA
• Accelerating voltage range: 350 V – 30 kV
• Landing energy range: 20 eV – 30 keV
• Maximum horizontal field width: 2.3 mm at 4 mm WD

[ Detectors ]
• Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE)
• Elstar in-column SE/BSE detector (ICD)
• Elstar in-column BSE detector (MD)
• Everhart-Thornley SE detector (ETD)
• IR camera for viewing sample/column
• Thermo Scientific Nav-Cam™ Sample Navigation Camera
• Retractable low voltage, high contrast directional solid-state backscatter electron detector (DBS)*
• Retractable STEM 3+ detector with BF/ DF/ HAADF segments*
• Integrated beam current measurement
장비안내 The Verios 5 XHR SEM features an ultra-high-brightness electron source with next-generation UC+ monochromator technology to reduce the beam energy spread below 0.2 eV for beam currents up to 100 pA. This enables sub-nanometer resolution and highest surface sensitivity at low landing energies. The innovative Thermo Scientific Elstar™ Electron Column provides the foundation of the system’s unprecedented high resolution imaging capability. It offers the best nanoscale details, using the widest range of working conditions, whether operating at 30 keV in STEM mode to access structural information or at lower energies to obtain charge-free, detailed information from the surface. With its immersion mode and unique triple detection system located inside the column, the system is designed for simultaneous detector acquisition for angular and energy selective SE and BSE imaging.
Fast access to the most detailed nanoscale information is guaranteed, not only top-down, but also on tilted specimens or cross sections.Additional below-the lens detectors and the electron beam deceleration mode ensure the fast and easy simultaneous collection of all signals to reveal the smallest features in material surfaces or cross sections. Fast, accurate and reproducible results are obtained thanks to the unique design of the Elstar Column, which includes constant power lenses for higher thermal stability and electrostatic scanning for higher deflection linearity and speed.

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