Research Hub

대학 자원

대학 인프라와 자원을 공유해 공동 연구와 기술 활용을 지원합니다.

공동활용 연구장비

20180621000000216217.png

박막 두께 측정기

상담·문의하기

Surface Profiler

  • 모델명 Alpha-Step IQ
  • 제조사 Kla-tencor
  • 장비용도 계측
  • 장비구분 물리적측정장비 > 길이/위치/자세측정장비 > 위치/자세측정장비

상세정보

구축일자 2012-10-10
납품업체 Kla-tencor
위치 광주광역시 북구 첨단과기로 123 (오룡동) 1번지 광주과학기술원 다산빌딩 B1층 02
구성및성능 A variety of options are available to significantly enhance the capabilities of the ASIQ system beyond single-scan 2D measurements and trace analysis:
- Extended Vertical Range: increases the vertical range from the standard 550 μm to 2 mm
- Additional Surface Analysis Parameters: increase the number of surface analysis parameters from 27 to 48
- Multiple Language Support: software available in English, Japanese, Mandarin (Chinese), German, French, Italian, and Spanish
- High Magnification Optics: increase the optical field of view from the standard 3000 x 3000 μm to 1300 x 1300 μm- Color Camera: replaces the standard black and white camera both with digital zoom
- Statistical Process Control: Comprehensive analysis through population databases, control charts, box plots, and histograms
- Offline Analysis Software: provides the same analysis features of the Alpha-Step IQ for analysis on a separate computer
장비안내 Alpha step is a computerized, high sensitivity surface profiler that measures roughness, waviness, and step height in a variety of applications. It features the ability to measure micro-roughness, with up to 1 Å or less resolution. The computer offers powerful measurement control, data storage, analysis, and networking.

목록보기