Loading...
2009
유기반도체 박막증착을 위한 선형증착원의 유체유동해석
Analysis of Fluid Flow in the Linear Cell Source for Organic Semiconductor Thin Film Deposition
한국정밀공학회
양영수 외 1명
논문정보
- Publisher
- 한국정밀공학회지
- Issue Date
- 2009-10-01
- Keywords
- -
- Citation
- -
- Source
- -
- Journal Title
- -
- Volume
- 26
- Number
- 10
- Start Page
- 74
- End Page
- 80
- DOI
- ISSN
- 12259071
Abstract
This paper presents a study on fluid analysis of organic semiconductor thin film deposition process using the computational numerical method. In the production process, the thickness of deposited organic thin film depends om distribution of nozzle size in the linear cell system, so we analyze to decide the optimal nozzle system for uniform thickness of organic thin film. The results of deposited thickness of thin fil, by numerical analysis are in good agreement with those of tne experimental measurements.
- 전남대학교
- KCI
- 한국정밀공학회지
저자 정보
| 이름 | 소속 |
|---|---|
| 양영수 | 기계공학부 |