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논문 리스트

2008
마이크로 스위치 어레이를 이용한 MEMS 압력센서 A Study on MEMS Pressure Sensor Using Pressure Switch Array
한국기계가공학회
이동원 외 2명
논문정보
Publisher
한국기계가공학회지
Issue Date
2008-06-02
Keywords
-
Citation
-
Source
-
Journal Title
-
Volume
7
Number
2
Start Page
3
End Page
9
DOI
ISSN
15986721
Abstract
This paper describes a MEMS pressure sensor based on micro-switch array. It consists of a silicon substrate that has a thin metal-deposited diaphragm and an array of micro-switch patterned on a Pyrex glass. The micro-switch array to measure the change of a pressure is formed on a micromachined resistor made by indium tin oxide (ITO). The distance of each electrode on the ITO resistor is about 10 μm. When a pressure is applied to the diaphragm of the sensor, the Si diaphragm with a conductive layer starts to contact onto the micro-switch of the ITO resistor at a certain pressure level. The number of the micro-switch to be contacted to the diaphragm is changed due to increase of a contact area. The change of the electrical resistance between both ends of the ITO resistor is measured using a very simple electrical circuit. Basic characteristics of the fabricated prototype pressure sensor are successfully evaluated and the validity of the proposed pressure sensor is verified.

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이동원 기계공학부