Loading...
2008
마이크로 스위치 어레이를 이용한 MEMS 압력센서
A Study on MEMS Pressure Sensor Using Pressure Switch Array
한국기계가공학회
이동원 외 2명
논문정보
- Publisher
- 한국기계가공학회지
- Issue Date
- 2008-06-02
- Keywords
- -
- Citation
- -
- Source
- -
- Journal Title
- -
- Volume
- 7
- Number
- 2
- Start Page
- 3
- End Page
- 9
- DOI
- ISSN
- 15986721
Abstract
This paper describes a MEMS pressure sensor based on micro-switch array. It consists of a silicon substrate that
has a thin metal-deposited diaphragm and an array of micro-switch patterned on a Pyrex glass. The micro-switch
array to measure the change of a pressure is formed on a micromachined resistor made by indium tin oxide
(ITO). The distance of each electrode on the ITO resistor is about 10 μm. When a pressure is applied to the
diaphragm of the sensor, the Si diaphragm with a conductive layer starts to contact onto the micro-switch of the
ITO resistor at a certain pressure level. The number of the micro-switch to be contacted to the diaphragm is
changed due to increase of a contact area. The change of the electrical resistance between both ends of the ITO
resistor is measured using a very simple electrical circuit. Basic characteristics of the fabricated prototype
pressure sensor are successfully evaluated and the validity of the proposed pressure sensor is verified.
- 전남대학교
- KCI
- 한국기계가공학회지
저자 정보
| 이름 | 소속 |
|---|---|
| 이동원 | 기계공학부 |