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논문 리스트

2010
(InTe)x(GeTe) 박막의 비정질-결정질 상변화 Amorphous-to-Crystalline Phase Transition of (InTe)x(GeTe) Thin Films
한국전기전자재료학회
이현용 외 2명
논문정보
Publisher
전기전자재료학회논문지
Issue Date
2010-03-01
Keywords
-
Citation
-
Source
-
Journal Title
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Volume
23
Number
3
Start Page
199
End Page
205
DOI
ISSN
12267945
Abstract
The crystallization speed (v) of amorphous (InTe)x(GeTe) (x = 0.1, 0.3 and 0.5) films and their thermal, optical and electrical behaviors have been investigated using nano-pulse scanner (wavelength = 658 nm, laser beam diameter < 2 ㎛), X-ray diffraction (XRD), 4-point probe and UV-vis-IR spectrophotometer. These results were compared with those of Ge2Sb2Te5 (GST) film, comprehensively utilized for phase-change random access memory (PRAM). Both v-value and thermal stability of (InTe)0.1(GeTe) and (InTe)0.3(GeTe) films could be enhanced in comparison with those of the GST. Contrarily, the v-value in the (InTe)0.5(GeTe) film was so drastically deteriorated that we could not quantitatively evaluate it. This deterioration is thought because amorphous (InTe)0.5(GeTe) film has relatively high reflectance, resulting in too low absorption to cause the crystallization. Conclusively, it could be thought that a proper compositional (InTe)x(GeTe) films (e.g., x < 0.3) may be good candidates with both high crystallization speed and thermal stability for PRAM application.

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이현용 화학공학부