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논문 리스트

2008
다중-노출 홀로그라피 방법을 이용한 광자준결정 제작 Fabrication of Photonic Quasicrystals using Multiple-exposure Holographic Method
한국전기전자재료학회
이현용 외 2명
논문정보
Publisher
전기전자재료학회논문지
Issue Date
2008-09-15
Keywords
-
Citation
-
Source
-
Journal Title
-
Volume
21
Number
9
Start Page
829
End Page
834
DOI
ISSN
12267945
Abstract
Two-dimensional photonic quasicrystal (PQCs) template patterns have been fabricated on a 1.1 ㎛-thick DMI-150 photoresist using a multiple-exposure holographic method. A 442-nm HeCd laser was utilized as a light source and the holographic exposure was carried out at a fixed angle of θ = 6o. After the first holographic exposure, the sample was rotated to a proper angle and the second exposure was performed to the same manner. This exposure process was repeated n/2 times to obtain n-fold symmetric PQC patterns and then the sample was developed. The diffraction patterns of the fabricated PQC template were observed using a 632.8-nm HeNe laser. The fabricated PQCs exhibited 8, 10 and 12-fold rotational symmetry, which was in a good agreement with the interference simulation results. In addition, the diffraction patterns with n-rotation symmetry were observed for the corresponding n-fold PQCs. We believe that the multiple-exposure holography is a good method to fabricate the mesoscale PQCs w

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이현용 화학공학부