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2008
다중-노출 홀로그라피 방법을 이용한 광자준결정 제작
Fabrication of Photonic Quasicrystals using Multiple-exposure Holographic Method
한국전기전자재료학회
이현용 외 2명
논문정보
- Publisher
- 전기전자재료학회논문지
- Issue Date
- 2008-09-15
- Keywords
- -
- Citation
- -
- Source
- -
- Journal Title
- -
- Volume
- 21
- Number
- 9
- Start Page
- 829
- End Page
- 834
- DOI
- ISSN
- 12267945
Abstract
Two-dimensional photonic quasicrystal (PQCs) template patterns have been fabricated on a 1.1 ㎛-thick DMI-150 photoresist using a multiple-exposure holographic method. A 442-nm HeCd laser was utilized as a light source and the holographic exposure was carried out at a fixed angle of θ = 6o. After the first holographic exposure, the sample was rotated to a proper angle and the second exposure was performed to the same manner. This exposure process was repeated n/2 times to obtain n-fold symmetric PQC patterns and then the sample was developed. The diffraction patterns of the fabricated PQC template were observed using a 632.8-nm HeNe laser. The fabricated PQCs exhibited 8, 10 and 12-fold rotational symmetry, which was in a good agreement with the interference simulation results. In addition, the diffraction patterns with n-rotation symmetry were observed for the corresponding n-fold PQCs. We believe that the multiple-exposure holography is a good method to fabricate the mesoscale PQCs w
- 전남대학교
- KCI
- 전기전자재료학회논문지
저자 정보
| 이름 | 소속 |
|---|---|
| 이현용 | 화학공학부 |