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논문 리스트

2010
다중노광 나노구 리소그라피를 이용한 쌍-광자결정 어레이 제작 Fabrication of Pair-Photonic Crystal Arrays using Multiple-Exposure Nanosphere Lithography
한국전기전자재료학회
이현용 외 2명
논문정보
Publisher
전기전자재료학회논문지
Issue Date
2010-03-01
Keywords
-
Citation
-
Source
-
Journal Title
-
Volume
23
Number
3
Start Page
245
End Page
249
DOI
ISSN
12267945
Abstract
Two dimensional(2D) pair-photonic crystals (pair-PCs) have been fabricated by a multiple-exposure nanosphere lithography (MENSL) method using the self-assembled nanospheres as lens-mask patterns and the collimated laser beam as a multiple-exposing source. The arrays of the 2D pair-PCs exhibited variable lattice structures and shape the control of rotating angle (), tilting angle () and the exposure conditions. In addition, the base period or filling factor of pair-PCs as well as their shapes could be changed by experimental conditions and nanosphere size. A 1.18-μm-thick resist was spin- coated on Si substrate and the multiple exposure was carried out at change of and . Images of prepared 2D pair-PCs were observed by SEM. We believe that the MENSL method is a suitable useful tool to realize the pair-periodic arrays of large area.

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이현용 화학공학부