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2010
다중노광 나노구 리소그라피를 이용한 쌍-광자결정 어레이 제작
Fabrication of Pair-Photonic Crystal Arrays using Multiple-Exposure Nanosphere Lithography
한국전기전자재료학회
이현용 외 2명
논문정보
- Publisher
- 전기전자재료학회논문지
- Issue Date
- 2010-03-01
- Keywords
- -
- Citation
- -
- Source
- -
- Journal Title
- -
- Volume
- 23
- Number
- 3
- Start Page
- 245
- End Page
- 249
- DOI
- ISSN
- 12267945
Abstract
Two dimensional(2D) pair-photonic crystals (pair-PCs) have been fabricated by a multiple-exposure nanosphere lithography (MENSL) method using the self-assembled nanospheres as lens-mask patterns and the collimated laser beam as a multiple-exposing source. The arrays of the 2D pair-PCs exhibited variable lattice structures and shape the control of rotating angle (), tilting angle () and the exposure conditions. In addition, the base period or filling factor of pair-PCs as well as their shapes could be changed by experimental conditions and nanosphere size. A 1.18-μm-thick resist was spin- coated on Si substrate and the multiple exposure was carried out at change of and . Images of prepared 2D pair-PCs were observed by SEM. We believe that the MENSL method is a suitable useful tool to realize the pair-periodic arrays of large area.
- 전남대학교
- KCI
- 전기전자재료학회논문지
저자 정보
| 이름 | 소속 |
|---|---|
| 이현용 | 화학공학부 |