To evaluate the wear characteristics of very thin ceramic coated layer, it is very important to investigate its wear process in great detail. An effective method for investigating the wear of a thin layer is the observation of wear process in microscopic detail, using in-situ system. In this study, based on the SEM Tribosystem as in-situ system, the microscopic wear mode of TiN coatings was investigated in repeated sliding. Consequently, four modes were revealed for TiN coatings: Ploughing, powder formation, flake formation and coating delimitation. Sc(Severity of contact) can clarify transition condition of those microscopic wear modes.