The ceramic coatings are excellent materials of cutting tools and sliding parts. To evaluate the wear characteristics of very thin ceramic coated layer, it is very important to investigate its wear process microscopically. An effective method for investigating the wear of a thin layer is the observation of wear process in microscopic detail using in-situ system. In this study, using the SEM Tribosystem as in-situ system, the microscopic wear mode of TiN coatings was investigated in repeated sliding. As results, four modes were observed for TiN coatings: Ploughing, powder formation, flake formation and coating delimitation. The observation of the microscopic wear by in-situ system can clarify the allowable stress of TiN coating.