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2011
자성체 피복형 연마입자를 이용한 유리의 평면 래핑의 기초 연구
Fundamental Research on Polishing of Glass Plates by Coated-type Magnetic Abrasives
한국기계가공학회
문봉호
논문정보
- Publisher
- 한국기계가공학회지
- Issue Date
- 2011-06-30
- Keywords
- -
- Citation
- -
- Source
- -
- Journal Title
- -
- Volume
- 10
- Number
- 3
- Start Page
- 108
- End Page
- 112
- DOI
- ISSN
- 15986721
Abstract
In order to obtain excellent flatness and surface roughness of glass substrate disk, uniform distribution of abrasives
should be important for uniform polishing. We introduced coated-type magnetic abrasives and magnetic field to
a lapping for the improvement of surface roughness and removal rate. Polishing properties with the conventional
diamond abrasives and the coated-type magnetic abrasives were compared. As a result, the coated-type magnetic
abrasives showed small surface roughness and large removal rate by applying magnetic field. And it also was shown
that coated-type magnetic abrasives could save the more amount of polishing liquid under the same removal rate
than the conventional diamond abrasives can.
- 전남대학교
- KCI
- 한국기계가공학회지
저자 정보
| 이름 | 소속 |
|---|---|
| 문봉호 | 기계시스템공학과 |