Experimental study has been carried out to investigate combustion and emission characteristics in horizontally stacked SiC porous media with various pore structures and equivalence ratio conditions. Based on preliminary results from flame visualization and stabilization experiments with SiC porous media, porous-media burner was fabricated for processing NF3 thermally. The porous-media burner is composed of two layer structures: alumina ball layer and SiC porous media layer which initiates excess enthalpy combustion. To describe the degree of flame stability, we defined three regimes such as porous combustion, surface combustion, and blow-off. For the equivalence ratio of 0.7, NOx and CO were emitted at 4.6 ppm and 0.9 ppm respectively in normal state operation. However, in process state operation, NOx and CO increased up to 160.8 ppm and 348.1 ppm respectively for the equivalence ratio of 0.52 due to NOx formation from NH3 decomposition process and the quenching reaction caused by partial N2 flowing into the porous media.