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2017
유연성 높은 캔틸레버 제작을 위한 스프레이 코팅 방법 연구
Study of Manual Spray Coating Method for Fabricating Flexible Cantilever
한국센서학회
김지관
논문정보
- Publisher
- 센서학회지
- Issue Date
- 2017-09-01
- Keywords
- -
- Citation
- -
- Source
- -
- Journal Title
- -
- Volume
- 26
- Number
- 5
- Start Page
- 366
- End Page
- 369
- ISSN
- 1225-5475
Abstract
This work presents a detailed study of several parameters on the spray coating method for fabricating a flexible cantilever. Con- ventionally, spin coating method have been widely used in the microelectromechanical system (MEMS) fabrication process. However, the major drawback of this method is the difficulties in protecting various topography with photoresist film, particularly when the deviceis manufactured in high aspect ratio. It is also a challenging process to form a small pattern in the etched area. On the other hand, thecommercial spray coating systems are not advantageous from an economic perspective and the technique is also providing less efficient. In order to solve these issues, we have developed a manual spray coating system which can be efficiently used by combining the acces- sories available in the laboratory. The developed spray coating system consists of a spin-coater, motorized stage, a spray gun with thecapable of controlling centrifugal force, injection amount, injection angle, and spray range. The major advantage of the proposed spraycoating system is its reasonable fabrication cost. Secondly, the system can be easily disassembled after finishing the coating experiment. Owing to the mentioned advantages, we sincerely believe that the proposed spray coating system can be effectively used in many related applications.
- 광주대학교
- KCI
- 센서학회지
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